Article: On-Chip Modification of Titanium Electrothermal Characteristics by Joule Heating: Application to Terahertz Microbolometer.
Nanomaterials (Basel, Switzerland)
2024 Volume 14, Issue 2
Abstract: ... to the heating. A negative large temperature coefficient of resistance (TCR) of -0.32%/K was also observed owing ...
Abstract | This study demonstrates the conversion of metallic titanium (Ti) to titanium oxide just by conducting electrical current through Ti thin film in vacuum and increasing the temperature by Joule heating. This led to the improvement of electrical and thermal properties of a microbolometer. A microbolometer with an integrated Ti thermistor and heater width of 2.7 µm and a length of 50 µm was fabricated for the current study. Constant-voltage stresses were applied to the thermistor wire to observe the effect of the Joule heating on its properties. Thermistor resistance ~14 times the initial resistance was observed owing to the heating. A negative large temperature coefficient of resistance (TCR) of -0.32%/K was also observed owing to the treatment, leading to an improved responsivity of ~4.5 times from devices with untreated Ti thermistors. However, this does not improve the noise equivalent power (NEP), due to the increased flicker noise. Microstructural analyses with transmission electron microscopy (TEM), transmission electron diffraction (TED) and energy dispersive X-ray (EDX) confirm the formation of a titanium oxide (TiO |
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Language | English |
Publishing date | 2024-01-19 |
Publishing country | Switzerland |
Document type | Journal Article |
ZDB-ID | 2662255-5 |
ISSN | 2079-4991 |
ISSN | 2079-4991 |
DOI | 10.3390/nano14020225 |
Database | MEDical Literature Analysis and Retrieval System OnLINE |
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