Article ; Online: X-ray mirrors with sub-nanometre figure errors obtained by differential deposition of thin WSi
Journal of synchrotron radiation
2023 Volume 30, Issue Pt 4, Page(s) 708–716
Abstract: ... of X-ray mirrors to be deployed on low-emittance synchrotron beamlines. During the deposition process ...
Abstract | Differential deposition by DC magnetron sputtering was applied to correct for figure errors of X-ray mirrors to be deployed on low-emittance synchrotron beamlines. During the deposition process, the mirrors were moved in front of a beam-defining aperture and the required velocity profile was calculated using a deconvolution algorithm. The surface figure was characterized using conventional off-line visible-light metrology instrumentation (long trace profiler and Fizeau interferometer) before and after the deposition. WSi |
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MeSH term(s) | X-Rays ; Radiography ; Algorithms ; Synchrotrons |
Language | English |
Publishing date | 2023-05-30 |
Publishing country | United States |
Document type | Journal Article |
ZDB-ID | 2021413-3 |
ISSN | 1600-5775 ; 0909-0495 |
ISSN (online) | 1600-5775 |
ISSN | 0909-0495 |
DOI | 10.1107/S1600577523003697 |
Database | MEDical Literature Analysis and Retrieval System OnLINE |
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