Article ; Online: Warp-Free TEM Sample Preparation Methods Using FIB/SEM Systems.
2022 , Page(s) 1–10
Abstract: Warping is a limiting factor when preparing transmission electron microscopy (TEM) samples using focused ion beam (FIB)/scanning electron microscope (SEM) systems. The conventional FIB sputtering process leaves at least one side of the lamella too thin ... ...
Abstract | Warping is a limiting factor when preparing transmission electron microscopy (TEM) samples using focused ion beam (FIB)/scanning electron microscope (SEM) systems. The conventional FIB sputtering process leaves at least one side of the lamella too thin to provide structural support to offset inherent stresses. As a result, warping can occur impacting imagining and reducing the potential size of lamellae. For example, capturing more than a few back-end metal layers in a 3 |
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Language | English |
Publishing date | 2022-09-09 |
Publishing country | England |
Document type | Journal Article |
ZDB-ID | 1385710-1 |
ISSN | 1435-8115 ; 1431-9276 |
ISSN (online) | 1435-8115 |
ISSN | 1431-9276 |
DOI | 10.1017/S1431927622012181 |
Database | MEDical Literature Analysis and Retrieval System OnLINE |
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