Article ; Online: High Pressure Chemical Vapor Deposition of Hydrogenated Amorphous Silicon Films and Solar Cells.
Advanced materials (Deerfield Beach, Fla.)
2016 Volume 28, Issue 28, Page(s) 5939–5942
Abstract: Thin films of hydrogenated amorphous silicon can be produced at MPa pressures from silane without the use of plasma at temperatures as low as 345 °C. High pressure chemical vapor deposition may open a new way to low cost deposition of amorphous silicon ... ...
Abstract | Thin films of hydrogenated amorphous silicon can be produced at MPa pressures from silane without the use of plasma at temperatures as low as 345 °C. High pressure chemical vapor deposition may open a new way to low cost deposition of amorphous silicon solar cells and other thin film structures over very large areas in very compact, simple reactors. |
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Language | English |
Publishing date | 2016-05-13 |
Publishing country | Germany |
Document type | Journal Article |
ZDB-ID | 1474949-X |
ISSN | 1521-4095 ; 0935-9648 |
ISSN (online) | 1521-4095 |
ISSN | 0935-9648 |
DOI | 10.1002/adma.201600415 |
Database | MEDical Literature Analysis and Retrieval System OnLINE |
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