Article: Gas-Phase Synthesis of Iron Silicide Nanostructures Using a Single-Source Precursor: Comparing Direct-Write Processing and Thermal Conversion.
The journal of physical chemistry. C, Nanomaterials and interfaces
2024 Volume 128, Issue 7, Page(s) 2967–2977
Abstract: The investigation of precursor classes for the fabrication of nanostructures is of specific interest for maskless fabrication and direct nanoprinting. In this study, the differences in material composition depending on the employed process are ... ...
Abstract | The investigation of precursor classes for the fabrication of nanostructures is of specific interest for maskless fabrication and direct nanoprinting. In this study, the differences in material composition depending on the employed process are illustrated for focused-ion-beam- and focused-electron-beam-induced deposition (FIBID/FEBID) and compared to the thermal decomposition in chemical vapor deposition (CVD). This article reports on specific differences in the deposit composition and microstructure when the (H |
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Language | English |
Publishing date | 2024-02-08 |
Publishing country | United States |
Document type | Journal Article |
ISSN | 1932-7447 |
ISSN | 1932-7447 |
DOI | 10.1021/acs.jpcc.3c08250 |
Database | MEDical Literature Analysis and Retrieval System OnLINE |
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