Article ; Online: Nano-optomechanical Resonators for Sensitive Pressure Sensing
ACS Applied Materials & Interfaces. 2022 Aug. 22, v. 14, no. 34, p. 39211-39219
2022 , Page(s) 39211–39219
Abstract: Nanomechanical sensors made from suspended graphene are sensitive to pressure changes. However, these devices typically function by obtaining an electrical signal based on the static displacement of a suspended graphene membrane and so, in practice, have ...
| Abstract | Nanomechanical sensors made from suspended graphene are sensitive to pressure changes. However, these devices typically function by obtaining an electrical signal based on the static displacement of a suspended graphene membrane and so, in practice, have limited sensitivity and operational range. The present work demonstrates an optomechanical Au/graphene membrane-based gas pressure sensor with ultrahigh sensitivity. This sensor comprises a suspended Au/graphene membrane appended to a section of hollow-core fiber to form a sealed Fabry–Pérot cavity. In contrast to conventional nanomechanical pressure sensors, pressure changes are monitored via resonant sensing with an optical readout. A miniature pressure sensor based on this principle was able to detect an ultrasmall pressure difference of 1 × 10–⁷ mbar in the ultrahigh-vacuum region with a pressure range of 4.1 × 10–⁵ to 8.3 × 10–⁶ mbar. Furthermore, this pressure sensor can work over an extended pressure range of 7 × 10–⁶ mbar to 1000 mbar at room temperature, outperforming commercial pressure sensors. Similar results were obtained using both the fundamental and higher-order resonant frequencies but with the latter providing improved sensitivity. This sensor has a wide range of potential applications, including indoor navigation, altitude monitoring, and motion detection. |
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| Keywords | altitude ; ambient temperature ; graphene ; nano-optomechanical ; pressure sensor ; gas damping ; fiber optic sensors |
| Language | English |
| Dates of publication | 2022-0822 |
| Size | p. 39211-39219 |
| Publishing place | American Chemical Society |
| Document type | Article ; Online |
| ISSN | 1944-8252 |
| DOI | 10.1021/acsami.2c09865 |
| Database | NAL-Catalogue (AGRICOLA) |
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