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  1. Article: Fractional Bandwidth up to 24% and Spurious Free SAW Filters on Bulk 15°YX-LiNbO

    Lu, Zengtian / Fu, Sulei / Xu, Zhibin / Wang, Weibiao / Zhang, Qiaozhen / Zhang, Jianrun / Zhang, Hui

    Micromachines

    2022  Volume 13, Issue 3

    Abstract: To cope with ubiquitous wireless connectivity and the increased and faster data delivery in 5G communication, surface acoustic wave (SAW) filters are progressively requiring wider bandwidths. Conventional bulk 15°YX- ... ...

    Abstract To cope with ubiquitous wireless connectivity and the increased and faster data delivery in 5G communication, surface acoustic wave (SAW) filters are progressively requiring wider bandwidths. Conventional bulk 15°YX-LiNbO
    Language English
    Publishing date 2022-03-14
    Publishing country Switzerland
    Document type Journal Article
    ZDB-ID 2620864-7
    ISSN 2072-666X
    ISSN 2072-666X
    DOI 10.3390/mi13030439
    Database MEDical Literature Analysis and Retrieval System OnLINE

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  2. Article ; Online: Large-Range Spurious Mode Elimination for Wideband SAW Filters on LiNbO₃/SiO₂/Si Platform by LiNbO₃ Cut Angle Modulation.

    Xu, Huiping / Fu, Sulei / Shen, Junyao / Lu, Zengtian / Su, Rongxuan / Wang, Rui / Song, Cheng / Zeng, Fei / Wang, Weibiao / Pan, Feng

    IEEE transactions on ultrasonics, ferroelectrics, and frequency control

    2022  Volume 69, Issue 11, Page(s) 3117–3125

    Abstract: A LiNbO3 (LN)/SiO2/Si multilayered structure was recently reported as a new platform for achieving wideband radio frequency (RF) filters. However, the in-band ripples in filters resulting from the spurious Rayleigh mode lead to deteriorated performance, ... ...

    Abstract A LiNbO3 (LN)/SiO2/Si multilayered structure was recently reported as a new platform for achieving wideband radio frequency (RF) filters. However, the in-band ripples in filters resulting from the spurious Rayleigh mode lead to deteriorated performance, and thus, a wide Rayleigh elimination window (REW) is highly desired for realizing spurious-free wideband surface acoustic wave (SAW) filters with a wide design space and good process tolerance. Here, we investigated the spurious mode suppression on the LN/SiO2/Si platform theoretically and experimentally through modulating the cut angle ( θ ) of LN. The K<sup>2</sup> dispersion characteristics of the main mode (shear-horizontal wave) and spurious mode (Rayleigh wave) on LN/SiO2/Si substrates were systematically analyzed by the finite-element method (FEM), along with bulk LN for comparison. It is found that the REW is wider on LN/SiO2/Si than bulk LN, as Rayleigh wave can be totally eliminated with Cu electrode normalized thickness ( [Formula: see text]) ranging from 0.1 to 0.19 when θ is between 19° and 22° on the LN/SiO2/Si platform, in contrast to the quite narrow REW on bulk LN restricted to some specific [Formula: see text]. To verify the simulation results, resonators were prepared on 15°YX-LN/SiO2/Si, 20°YX-LN/SiO2/Si, bulk 15°YX-LN, and bulk 20°YX-LN. In addition, the typical spurious-free wideband SAW filter with [Formula: see text] nm based on the 20°YX-LN/SiO2/Si platform demonstrates high performance with a center frequency ( [Formula: see text]) of 1.27 GHz, a minimum insertion loss (ILmin) of 0.7 dB, and a 3-dB fractional bandwidth (FBW) of ~20.1%. This work provides a workable solution in fabricating spurious-free wideband and low-loss SAW filters for fifth-generation (5G) applications.
    MeSH term(s) Silicon Dioxide ; Sound ; Computer Simulation
    Chemical Substances lithium niobate (12031-63-9) ; Silicon Dioxide (7631-86-9)
    Language English
    Publishing date 2022-11-02
    Publishing country United States
    Document type Journal Article ; Research Support, Non-U.S. Gov't
    ISSN 1525-8955
    ISSN (online) 1525-8955
    DOI 10.1109/TUFFC.2022.3152010
    Database MEDical Literature Analysis and Retrieval System OnLINE

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  3. Article ; Online: SAW Filters on LiNbO

    Xu, Huiping / Fu, Sulei / Su, Rongxuan / Liu, Peisen / Zhang, Shuai / Lu, Zengtian / Xiao, Boyuan / Wang, Rui / Song, Cheng / Zeng, Fei / Wang, Weibiao / Pan, Feng

    IEEE transactions on ultrasonics, ferroelectrics, and frequency control

    2023  Volume 70, Issue 9, Page(s) 1157–1169

    Abstract: The 5G communication system has experienced a substantial expansion of the spectrum, which poses higher requirements to radio frequency (RF) filters in enhancing their operating frequencies and bandwidths. To this end, this work focused on solving the ... ...

    Abstract The 5G communication system has experienced a substantial expansion of the spectrum, which poses higher requirements to radio frequency (RF) filters in enhancing their operating frequencies and bandwidths. To this end, this work focused on solving the filtering scheme for challenging 5G n77 and n78 bands and successfully implemented the corresponding spurious-free surface acoustic wave (SAW) filters exploiting large-coupling shear horizontal (SH) modes based on X-cut LiNbO3 (LN)/silicon carbide (SiC) heterostructure. Here, we initially investigated the suppression methods for spurious modes theoretically and experimentally and summarized an effective normalized LN thickness ( [Formula: see text] range of 0.15-0.30 for mitigating Rayleigh modes and higher order modes, as well as tilted interdigital transducers (IDT) by about 24° for eliminating transverse modes. Resonators with wavelengths ( λ) from 0.95 to [Formula: see text] were also fabricated, showing a scalable resonance from 2.48 to 4.21 GHz without any in-band ripple. Two filters completely meeting 5G n77 and n78 full bands were finally constructed, showing center frequencies ( f
    Language English
    Publishing date 2023-08-29
    Publishing country United States
    Document type Journal Article
    ISSN 1525-8955
    ISSN (online) 1525-8955
    DOI 10.1109/TUFFC.2023.3299635
    Database MEDical Literature Analysis and Retrieval System OnLINE

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  4. Article ; Online: Structure with thin SiO

    Shen, Junyao / Fu, Sulei / Su, Rongxuan / Xu, Huiping / Wang, Weibiao / Lu, Zengtian / Feng, Qiong / Zeng, Fei / Song, Cheng / Pan, Feng

    Ultrasonics

    2021  Volume 115, Page(s) 106460

    Abstract: With the development of fifth-generation wireless systems, the Internet of Things, and health services, surface acoustic wave (SAW)-based filters and sensors have attracted considerable interest. This study presents a new structure for high-frequency, ... ...

    Abstract With the development of fifth-generation wireless systems, the Internet of Things, and health services, surface acoustic wave (SAW)-based filters and sensors have attracted considerable interest. This study presents a new structure for high-frequency, large-coupling, and low-cost SAW devices that helps implement high-frequency and wideband filters and enhances the sensitivity of sensors. The structure is based on 15°Y-X LiNbO
    Language English
    Publishing date 2021-05-17
    Publishing country Netherlands
    Document type Journal Article
    ZDB-ID 200839-7
    ISSN 1874-9968 ; 0041-624X
    ISSN (online) 1874-9968
    ISSN 0041-624X
    DOI 10.1016/j.ultras.2021.106460
    Database MEDical Literature Analysis and Retrieval System OnLINE

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  5. Article: Enhanced Performance of ZnO/SiO₂/Al₂O₃ Surface Acoustic Wave Devices with Embedded Electrodes

    Su, Rongxuan / Fu, Sulei / Shen, Junyao / Chen, Zhenglin / Lu, Zengtian / Yang, Mingliang / Wang, Rui / Zeng, Fei / Wang, Weibiao / Song, Cheng / Pan, Feng

    ACS applied materials & interfaces. 2020 Aug. 24, v. 12, no. 37

    2020  

    Abstract: With the advent of the 5G era, surface acoustic wave (SAW) devices with a larger bandwidth and better temperature stability are strongly required, meanwhile the dimensions of devices are continuously scaling down. In this work, a new layout of ZnO/SiO₂/ ... ...

    Abstract With the advent of the 5G era, surface acoustic wave (SAW) devices with a larger bandwidth and better temperature stability are strongly required, meanwhile the dimensions of devices are continuously scaling down. In this work, a new layout of ZnO/SiO₂/Al₂O₃ SAW devices with embedded electrodes was developed, and with the help of the finite element method (FEM), the propagation characteristics were simulated. Through adopting embedded electrodes, a large electromechanical coupling coefficient (K²) of 6.6% for the Rayleigh mode can be achieved (5 times larger than that of the conventional ZnO/Al₂O₃ structure), feasible for wideband SAW devices, and a low acoustic velocity (Vₚ) of 2960 m/s is exhibited simultaneously, which benefits the miniaturization of SAW devices. The dramatic enhancement of K² is mainly attributed to the more efficient excitation of SAW in piezoelectric films. Furthermore, a SiO₂ overlay is added on the top of the structure to gain an excellent zero temperature coefficient of frequency (TCF). Experimentally, we successfully fabricated SAW one-port resonators based on the proposed structure and good characteristics of high K², low Vₚ, and small TCF as simulated were confirmed. Our results show that the proposed structure provides a viable route to design SAW devices with a large bandwidth, small size, and robust temperature compensation for practical use.
    Keywords acoustics ; finite element analysis ; temperature
    Language English
    Dates of publication 2020-0824
    Size p. 42378-42385.
    Publishing place American Chemical Society
    Document type Article
    Note NAL-AP-2-clean
    ISSN 1944-8252
    DOI 10.1021/acsami.0c12055
    Database NAL-Catalogue (AGRICOLA)

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  6. Article ; Online: Enhanced Performance of ZnO/SiO

    Su, Rongxuan / Fu, Sulei / Shen, Junyao / Chen, Zhenglin / Lu, Zengtian / Yang, Mingliang / Wang, Rui / Zeng, Fei / Wang, Weibiao / Song, Cheng / Pan, Feng

    ACS applied materials & interfaces

    2020  Volume 12, Issue 37, Page(s) 42378–42385

    Abstract: With the advent of the 5G era, surface acoustic wave (SAW) devices with a larger bandwidth and better temperature stability are strongly required, meanwhile the dimensions of devices are continuously scaling down. In this work, a new layout of ZnO/ ... ...

    Abstract With the advent of the 5G era, surface acoustic wave (SAW) devices with a larger bandwidth and better temperature stability are strongly required, meanwhile the dimensions of devices are continuously scaling down. In this work, a new layout of ZnO/SiO
    Language English
    Publishing date 2020-09-03
    Publishing country United States
    Document type Journal Article
    ISSN 1944-8252
    ISSN (online) 1944-8252
    DOI 10.1021/acsami.0c12055
    Database MEDical Literature Analysis and Retrieval System OnLINE

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    Order via subito

    This service is chargeable due to the Delivery terms set by subito. Orders including an article and supplementary material will be classified as separate orders. In these cases, fees will be demanded for each order.

    Inter-library loan at ZB MED

    Your chosen title can be delivered directly to ZB MED Cologne location if you are registered as a user at ZB MED Cologne.

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