Book ; Online: Micro- and Nano-Fabrication by Metal Assisted Chemical Etching
2021
Keywords | History of engineering & technology ; porous silicon ; Pd nanoparticles-assisted chemical etching ; etching rate ; ethanol electrooxidation ; X-ray diffractive optics ; zone plate ; high aspect ratio nanostructures ; metal-assisted chemical etching ; electroless deposition ; Al2O3 nanotube ; ultra-high aspect ratio ; gold (Au) metal assisted chemical etching ; atomic layer deposition ; anisotropic dry etching ; silicon cones ; metal assisted chemical etching ; transversal pores ; antireflection ; black GaAs ; photon recycling ; X-ray grating interferometry ; catalyst ; silicon ; gold electroplating ; magnetically guided metal-assisted chemical etching ; bulk Si etching ; curved Si structure ; catalyst encapsulation ; n/a |
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Size | 1 electronic resource (106 pages) |
Publisher | MDPI - Multidisciplinary Digital Publishing Institute |
Publishing place | Basel, Switzerland |
Document type | Book ; Online |
Note | English ; Open Access |
HBZ-ID | HT021044620 |
ISBN | 9783039438464 ; 3039438468 |
Database | ZB MED Catalogue: Medicine, Health, Nutrition, Environment, Agriculture |
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