Article ; Online: Modulation of Structural, Electronic, and Optical Properties of Titanium Nitride Thin Films by Regulated In Situ Oxidation.
ACS applied materials & interfaces
2023 Volume 15, Issue 3, Page(s) 4733–4742
Abstract: Epitaxial titanium nitride (TiN) and titanium oxynitride (TiON) thin films have been grown on sapphire substrates using a pulsed laser deposition (PLD) method in high-vacuum conditions (base pressure <3 × ... ...
Abstract | Epitaxial titanium nitride (TiN) and titanium oxynitride (TiON) thin films have been grown on sapphire substrates using a pulsed laser deposition (PLD) method in high-vacuum conditions (base pressure <3 × 10 |
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Language | English |
Publishing date | 2023-01-10 |
Publishing country | United States |
Document type | Journal Article |
ISSN | 1944-8252 |
ISSN (online) | 1944-8252 |
DOI | 10.1021/acsami.2c18926 |
Database | MEDical Literature Analysis and Retrieval System OnLINE |
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