Article ; Online: Interface State Density Prediction between an Insulator and a Semiconductor by Gaussian Process Regression Models for a Modified Process.
ACS omega
2023 Volume 8, Issue 30, Page(s) 27458–27466
Abstract: During data-driven process condition optimization on a laboratory scale, only a small-size data set is accessible and should be effectively utilized. On the other hand, during process development, new operations are frequently inserted or current ... ...
| Abstract | During data-driven process condition optimization on a laboratory scale, only a small-size data set is accessible and should be effectively utilized. On the other hand, during process development, new operations are frequently inserted or current operations are modified. These accessible data sets are somewhat related but not exactly the same type. In this study, we focus on the prediction of the quality of the interface between an insulator and GaN as a semiconductor for the potential application of GaN power semiconductor devices. The quality of the interface was represented as the interface state density, |
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| Language | English |
| Publishing date | 2023-07-18 |
| Publishing country | United States |
| Document type | Journal Article |
| ISSN | 2470-1343 |
| ISSN (online) | 2470-1343 |
| DOI | 10.1021/acsomega.3c02980 |
| Database | MEDical Literature Analysis and Retrieval System OnLINE |
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