Article ; Online: Controllable Oxidation of ZrS
Advanced materials (Deerfield Beach, Fla.)
2023 Volume 35, Issue 18, Page(s) e2212079
Abstract: High-κ materials that exhibit large permittivity and band gaps are needed as gate dielectrics to enhance capacitance and prevent leakage current in downsized technology nodes. Among these, monoclinic ... ...
Abstract | High-κ materials that exhibit large permittivity and band gaps are needed as gate dielectrics to enhance capacitance and prevent leakage current in downsized technology nodes. Among these, monoclinic ZrO |
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Language | English |
Publishing date | 2023-03-24 |
Publishing country | Germany |
Document type | Journal Article |
ZDB-ID | 1474949-X |
ISSN | 1521-4095 ; 0935-9648 |
ISSN (online) | 1521-4095 |
ISSN | 0935-9648 |
DOI | 10.1002/adma.202212079 |
Database | MEDical Literature Analysis and Retrieval System OnLINE |
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