Article ; Online: Fuzzy sliding mode control of piezo-driven stage.
The Review of scientific instruments
2022 Volume 93, Issue 1, Page(s) 15011
Abstract: The motion stage with flexible hinges as a guiding mechanism can realize nanometer-level precision positioning. This stage uses a piezoelectric (PZT) actuator as the driving unit. In order to describe the mechanical characteristics of this piezo-driven ... ...
| Abstract | The motion stage with flexible hinges as a guiding mechanism can realize nanometer-level precision positioning. This stage uses a piezoelectric (PZT) actuator as the driving unit. In order to describe the mechanical characteristics of this piezo-driven stage, a double-parallel four-bar mechanism based on eight flexible hinges is analyzed. The natural frequency and modal of this stage are analyzed with the finite element method. In order to reduce the hysteresis influence of the PZT actuator, the model parameters based on the Bouc-Wen hysteresis model are identified by using the particle swarm optimization algorithm, and the boundedness of the hysteresis phenomenon is determined by this model. On this basis, the PZT hysteresis is regarded as a disturbance, and a proportional-integral-differential (PID)-type fuzzy sliding mode control (FSMC) is designed. Taking errors and the derivation in the errors as input and the parameters of the PID sliding surface as the output, the fuzzy sliding mode function is constructed. In addition, taking the absolute value of the sliding mode function as the input and the adjustment factor of the switching control as the output, the fuzzy switching control is constructed. Finally, the effectiveness of the FSMC is verified through several experiments. |
|---|---|
| Language | English |
| Publishing date | 2022-02-01 |
| Publishing country | United States |
| Document type | Journal Article |
| ZDB-ID | 209865-9 |
| ISSN | 1089-7623 ; 0034-6748 |
| ISSN (online) | 1089-7623 |
| ISSN | 0034-6748 |
| DOI | 10.1063/5.0075029 |
| Database | MEDical Literature Analysis and Retrieval System OnLINE |
More links
Kategorien
In stock of ZB MED Bonn / Germany
| Z 4' 46/112: Show issues |
Order via subito
This service is chargeable due to the Delivery terms set by subito. Orders including an article and supplementary material will be classified as separate orders. In these cases, fees will be demanded for each order.
Inter-library loan at ZB MED
Your chosen title can be delivered directly to ZB MED Cologne location if you are registered as a user at ZB MED Cologne.